Soitec (Bernin, France) has joined Sematech’s front end processes (FEP) and advanced metrology programs, located at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.

Sematech and Soitec plan to develop dimensional and films metrology on Soitec’s SOI wafers as part of a wider collaboration aimed at extending CMOS and high-mobility FinFET technologies. The effort will include advanced metrology, materials, process technology, and device characterization.

The partnership aims to foster the development of advanced processes and devices, based on Soitec’s silicon-on-insulator (SOI) wafers and other engineered substrates. The collaboration also will focus on applying Sematech’s metrology expertise towards extending current transistor designs.

Soitec and Sematech are working to extend SOI technology. (Source: Symposium on VLSI Technology).

Christophe Maleville, senior vice president of Soitec’s Microelectronics Business Unit, said, “Due to their expertise in advanced CMOS and FinFET transistor modules, Sematech was a natural choice to partner with in developing advanced metrology techniques and device characterization for mobility performance.”

Raj Jammy, Sematech’s vice president of emerging technologies, said, “Soitec’s expertise in substrate fabrication methodology will complement our own device and process expertise, as well as enable us to offer our experience in developing leading-edge metrology capabilities to characterize these advanced devices and evaluate critical defects. We will work together to develop practical and promising high-mobility non-planar and metrology approaches to speed the transition of these new innovations to mainstream semiconductor production.”

Sematech’s FEP program is exploring new materials and transistor structures, and alternative non-volatile memories. Sematech’s Advanced Metrology program seeks to identify key gaps in measurement technology for advanced devices and to develop solutions to meet the needs of the sub-20 nm technology node and beyond.

Tags: finFET, metrology, Sematech, semiconductor manufacturing, SOI, Soitec

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