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SPIE Advanced Lithography conference concludes

Exposures, and reducing their cost, were a theme running through the 2015 SPIE Advanced Lithography Symposium this week in San Jose, Calif., the center of Silicon Valley.

Learning to live with negative tone

In lithography for manufacturing semiconductors, a negative tone can be a positive attribute.

Directed Self Assembly Hot Topic at SPIE

At this week’s SPIE Advanced Lithography Symposium in San Jose, Calif., the hottest three-letter acronym is less EUV and more DSA, as in directed self-assembly.

Proponents of EUV, immersion lithography face off at SPIE

The two main camps in optical lithography are arrayed for battle at the SPIE Advanced Lithography Symposium. EUVt lithography, on one side, is represented by ASML Holding, its Cymer ...

SPIE plenary takes in photonics, 3DICs, connected devices

Speakers at the plenary session of the SPIE Advanced Lithography conference covered a wide variety of topics, from photonics to 3D chips to the Internet of Things, on Monday morning, ...

Complexity is the Theme at Lithography Conference

Nikon and KLA-Tencor put on separate conferences in San Jose, Calif., on Sunday, February 22, tackling issues in advanced optical lithography. The overarching theme in both sessions ...



News Stories

SPIE Advanced Lithography conference concludes

Exposures, and reducing their cost, were a theme running through the 2015 SPIE Advanced Lithography Symposium this week in San Jose, Calif., the center of Silicon Valley.

Learning to live with negative tone

In lithography for manufacturing semiconductors, a negative tone can be a positive attribute.

Directed Self Assembly Hot Topic at SPIE

At this week’s SPIE Advanced Lithography Symposium in San Jose, Calif., the hottest three-letter acronym is less EUV and more DSA, as in directed self-assembly.

Technology Features

Feature Articles

Changes and Challenges Abound in Multi-patterning Lithography

Multi-patterning lithography is a fact of life for many chipmakers. Experts in the fields of electronic design automation and lithography address the issues associated with the technology. ...

Experts at the Table: Focus on Semiconductor Materials

The cutting edge in semiconductor manufacturing has meant not only big changes in IC design and process technology, but also in semiconductor materials. Experts weigh in from Linde ...

Experts at the Table: Focus on Semiconductor Materials

The cutting edge in semiconductor manufacturing has meant not only big changes in IC design and process technology, but also in semiconductor materials. Experts weigh in from Linde ...

Monolithic 3D breakthrough at IEEE S3S 2014

In the upcoming 2014 IEEE S3S conference (October 6-9), MonolithIC 3D will unveil a breakthrough flow that is game-changing for 3D IC. For the first time ever monolithic 3D (“M3DI”) ...

Process Watch: Sampling matters

Determining an optimum sampling strategy comes down to weighing the cost of process control against the benefit of capturing the defect or other excursion in a timely manner.

Foundry, EDA partnership eases move to advanced process nodes

A leading semiconductor foundry and an EDA vendor with design-for-yield (DFY) solutions have enjoyed a long-term partnership. Recently, they worked together to leverage DFY technologies ...

Sustainability through Materials Recovery

Recovering and reusing materials is becoming an increasingly essential consideration in order to ensure consistent quality, a stable supply of materials, and lower costs. On- and off-site ...

Qualcomm: Scaling down is not cost-economic anymore - so we are looking at true monolithic 3D

Over the course of three major industry conferences (VLSI 2013, IEDM 2013 and DAC 2014), executives of Qualcomm voiced a call for monolithic 3D "to extend the semiconductor roadmap ...

IP interoperability in SoCs: Mix and match doesn’t always work

More often than not, a design re-spin isn’t just a simple re-spin with a tweak here and a tweak there. The new design will probably have to comply with modified

Roll over flat panel displays

Flexible displays is a technological field that has been in R&D and pre-commercial development for several years, but what needs to happen to make volume production a reality, in ...

Podcasts/Videos/Webcasts

Solid State Watch: January 23-29, 2015

Solid growth in automotive semiconductor market; $4M grant to UMass Lowell for printed and flexible electronics development; Book-to-bill ratio below parity; Researchers use oxides ...

Solid State Watch: January 16-22, 2015

SUNY Poly announces founding president; Solving an organic semiconductor mystery; UC Berkeley Extension announces new semiconductor IC program; 2015 tech trends and drivers

Solid State Watch: December 12-19, 2014

Book-to-bill above parity in November; imec demonstrates graphene EAM on IEDM 2014; Amkor licenses copper pillar wafer bump tech to GLOBALFOUNDRIES; Desktop monitor market experiences ...

Solid State Watch: December 5-11, 2014

Murata completes acquisition of Peregrine; North Carolina State University researches stacking semiconductor materials; SIA announces new president and CEO; Entegris announces availability ...

Solid State Watch: November 25-December 4, 2014

Cypress and Spansion announce merger; SEMATECH announces promising EUV research; Global semiconductor sales reach $29.7B in October; Soitec and CEA-Leti establish new solar cell efficiency ...

Solid State Watch: November 14-20, 2014

Revenue from industrial semiconductors on the rise; Combo MEMS sensors market to reach $1.4B by 2019; Notebook PC market grows while tablets struggle; Book-to-bill below parity for ...

Solid State Watch: November 7-14, 2014

A new product scope for an expanded Information Technology Agreement announced; Silicon wafer shipments increased in third quarter; New CEO of SEMATECH; SIA board of directors announces ...

Solid State Watch: October 31-November 6, 2014

The growing sensors market; Texas Instruments to expand operations in China; GlobalFoundries partners in INVECAS; Worldwide sales of semiconductors hits record-breaking high ...

Solid State Watch: October 23-30, 2014

GLOBALFOUNDRIES to take over IBM's commercial semi business; MegaChips acquires SiTime; imec and Coventor collaborate; Mergers and acquisitions shake up automotive semiconductor landscape ...

Solid State Watch: SEMICON Europa Special Edition

Pete Singer interviews new CEA-Leti CEO in Grenoble, France.