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IN THIS ISSUE — March 27, 2012
1. News & Features
2. Blogs
NEWS & FEATURES
DNS Ponders Ice as New Wafer Cleaning Agent
Technologists from Dai Nippon Screen said they are working on a single-wafer cleaning technique which relies on the expansive force which occurs when water becomes ice. A major Asian foundry is working with DNS to bring the ice cleaning technique into commercial use, executives said at the Sematech Surface Preparation and Clean Conference (SPCC).
Red Micro Wire Claims a Better Copper Wire
Copper wiring, often with palladium coating, is being adopted by assembly houses seeking to save on material costs. Now, Red Micro Wire claims it has a less-expensive way to create assembly wire, with a metal core coated with glass. The wire is cast, not drawn, and can be thinned down to smaller diameters than Pd-coated copper, according to RMW.
3D Chip Mania Grows but Mass Adoption Lags
3D TSV chips are considered a "game changer" in the market, but mass production is still a moving target. However, a team of IBM and Swiss researchers will shortly roll out a test chip that could accelerate the shift to "true" 3D devices in the market. The group is devising a 3D stack that nearly parallels the density of a human brain.
Top Five Design and Manufacturing Challenges at 20nm
The hottest topic in the leading-edge silicon foundry world centers around the shift from planar transistors to finFETs at 14nm. But the industry is getting ahead of itself, as experts warn there are still enormous IC design and manufacturing challenges at the 20nm process node. Experts list five of the bigger challenges - or trends - in the arena.
AKT-PECVD Supports IGZO Display Transistors
Applied's AKT Display Business Group is supporting a silicon-dioxide dielectric solution which is key to faster displays based on IGZO backplane transistors. "Companies have their roadmaps to make IZGO as cheap as amorphous silicon," PECVD marketing manager Doug Hayden said.
Chip Makers Mull Plans to Insert DSA at 14nm
Faced with the dreaded multi-patterning era and delays with EUV, chip makers are taking a harder look at a technology that could save the day for the industry: directed self-assembly (DSA). In fact, several IC vendors are mulling plans to implement DSA at the 14nm node or so — an insertion point that is far sooner than previously thought, according to one DSA materials supplier.
IBM Staying on SOI Technology for 14nm FinFETs
IBM will continue to use SOI technology as it moves to finFETs at the 14 nm node, said IBM vice president Gary Patton. The Fishkill Alliance will pursue bulk finFETs at the 14nm node, but IBM sees advantages to SOI for its server processors and the Asics it makes for its external customers, Patton said.
IBM, GlobalFoundries, Samsung Tip finFETs at 14nm
IBM's technology alliance members, IBM, GlobalFoundries and Samsung, have tipped their process roadmaps following the 20nm node, saying that they will move to finFET technology at 14nm. The firms also attempted to ease the angst among potential customers in terms of moving from conventional planar transistors to complex finFET structures.
Common Platform Partners Readying EUV Center
An EUV Center of Competency is being constructed at the Albany Nanotech center by IBM, GlobalFoundries, Samsung, and suppliers. The building is in the final stage of construction now and R&D operations will begin in the second half of this year, said IBM vice president Gary Patton, speaking at the Common Platform technology event. TSVs, optical interconnect, silicon nanowires, and CNTs all will be needed to advance CMOS scaling, Patton said in a keynote speech.
ST-Ericsson Adopts FD-SOI for Mobile Products
ST-Ericsson will use FD-SOI technology for its NovaThor mobile chipsets and others. ST-E has worked with Soitec, STMicroelectronics, and Leti to develop the technology. Fully depleted silicon on insulator technology rivals vertical transistors in terms of power and performance, while requiring fewer manufacturing steps than planar bulk CMOS processes.
TEL to Buy NEXX Systems for $206 Million
Tokyo Electron Ltd. (TEL) has reached a definitive agreement to acquire U.S.-based NEXX Systems Inc. for $206 million. The acquisition of NEXX will expand TEL's position in advanced 3D packaging tool technology. NEXX sells electrochemical deposition (ECD) and physical vapor deposition (PVD) systems for 3D TSV and related applications.
ASML Becomes Leading Semi Equipment Vendor
VLSI Research said ASML became the leading semiconductor equipment vendor in 2011. Applied Materials had held the top spot since 1992. Non-lithography process tool vendors grew only 5 percent last year. Going forward, the introduction of EUV lithography could supercharge ASML's revenues.
Vendors Aim to Jumpstart Temporary Bonding Market
Some blame one set of fab tool technologies — the temporary bonding and debonding systems — as one of the bottlenecks in 3D chip production. Seeking to change the landscape, TEL has entered this tool market. And another new player — Applied Materials — is reportedly readying a new tool, according to sources and analysts.
SICAS Shuttered, WSTS Wounded by Departures
The SIA shut down its quarterly Semiconductor International Capacity Statistics (SICAS) report on semiconductor wafer fab capacity and utilization rates. The SIA's decision comes just days after news that Intel had dropped out of the larger WSTS. SICAS provided insight into capacity utilization trends that are "very difficult to acquire any other way," said analyst Bill McClean.
More News & Features
BLOGS / TWITTER
Editor's View

GlobalFoundries Yield Rebound
How did GlobalFoundries boost 32nm yields at its Dresden fab? Single-wafer cleans and bright field wafer inspections played key roles.
Mentor Musings

Colorblind—Colorless versus Two-Color Double Patterning Design
People are always asking "What should I expect when I start designing at 20nm using double patterning?"
Viewpoints: SEMI

European Policy Considerations for Supporting the 450mm Supply Chain and Existing Manufacturing
European competitiveness in the semiconductor industry was the focus of the SEMI Industry Strategy Symposium Europe 2012 executive conference recently held in Munich, Germany.
Litho Guru

Lithography: How Slow Can We Go?
What happens to the economics of Moore's Law if the pace of lithography innovation slows?
ASN's All Things SOI

FD-SOI – Consortium Results (Part 2 of 3): Power and Performance
The SOI Consortium benchmarked 28nm bulk vs FD-SOI ARM cores and memory controllers in silicon.
ImPatterning

Advanced Semiconductor Device Lithography – pushing the optical limit for lithography
Given that the alternatives all have challenges, it looks to me that optical lithography will have to deliver the 16 nm and most likely the 11 nm node. In my last blog, I reviewed the news from SPIE's Advanced Lithography conference on all the non-optical solutions.
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VIDEOS/PODCASTS
Soitec COO Paul Boudre discusses what will be the best solution for 20nm – fully depleted silicon on insulator or bulk 3D transistors? The answer will likely include both.
Just how easy is to move designs from one foundry to another? It depends who you ask.
More Videos/Podcasts