Extending Copper Interconnect Beyond The 14nm Node
Fabricating interconnects is one of the most process-intensive and cost-sensitive parts of manufacturing.
"..." - Il Prof

Deep Insights for Chip Builders
Fabricating interconnects is one of the most process-intensive and cost-sensitive parts of manufacturing.
Testing interposer-based versions of stacked die and future versions using through-silicon vias.
EUV will introduce unwanted patterning distortions that must be accurately modeled and corrected.
How to tame data file sizes, address fractured data files creation and streamline data review techniques.
Best practices for tackling electrical, physical and manufacturing challenges.
Enabling 12 technology nodes in 12 years.
Decreasing time to yield requires planning for what patterns to generate, what data to archive and hot to optimize your test program.
Double patterning marks a turning point in terms of lithography, variability and complexity.
A look at how to reduce custom/AMS design cycle time while improving design quality with on-demand, in-design signoff-quality verification.
A look at the challenges and various solutions using LELE at 20nm, including place and route effects, OPC and mask misalignment and image rounding.