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SPIE Advanced Lithography 2013 – day 4

The last day of the conference gave the tool updates. So how is EUV progressing?

SPIE Advanced Lithography 2013 – day 3

Day 3 of the Advanced Lithography Symposium saw even more papers on DSA.

SPIE Advanced Lithography 2013 – day 2

SPIE Advanced Lithography 2013 – day 1

Day 1: Awards, plenary talks, and devices made by EUV. A good start to a good week.

SPIE Advanced Lithography 2013 – day 0

The premier conference in lithography is set to begin in San Jose. I’ll be posting every day.

ASML to Buy Cymer

What does this deal mean for EUV development? And what about 193-nm?

Why the Big Players Like 450-mm Wafers

Intel, Samsung, and TSMC want to take over the semiconductor world. Will 450-mm wafers be the weapon that let’s them finally succeed?

Why 450-mm wafers?

As lithography costs go up, the benefits of a larger wafer size go down. Will the benefits of 450-mm wafers be worth the investment if they only result in a 10% cost reduction per chip?

Semicon West Lithography Report

OK, so I didn’t go to Semicon West. That doesn’t mean I don’t have opinions to share

The Resolution Limit of Hard Drive Manufacturing

Printing incredibly small features with standard single patterning lithography is just another day for hard drive makers.

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