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2018 SPIE Advanced Lithography – EUVL Conference Update

The 2018 SPIE Advanced Lithography meeting was held from February 25 to March 1, 2018 in San Jose, CA.

Latest on EUV Source Technology – Highlights from 2017 Source Workshop

In this blog, I present the latest status on EUV source technology from the 2017 Source Workshop, held last November at UCD in Dublin.

New Frontiers for EUVL – Sources and Metrology: Topics for 2017 Source Workshop (November 6-8, 2017, Dublin, Ireland)

As the focus of industry and press turns to insertion dates for EUVL in fabs, I am putting my thoughts on future nodes of EUVL for several reasons.

EUVL Technology Status Update

This blog gives the latest update on the status of EUVL, based on data released this summer from the 2017 EUVL Workshop, 2017 Semicon West and recent announcements.

Understanding EUV Lithography Basics and Status – Key Concepts

For a better understanding of EUVL’s status, challenges and opportunities, it is important to study its fundamental components.

Progress in Short and Long Term Focus Areas for EUVL

Latest news on EUVL technology status is a topic of much interest to community involved in making high‑end next generation computer chips.

Further Thoughts from the 2017 SPIE AL EUV Lithography Conference

In the previous blog, I listed technology status and would now like to discuss a couple of topics in detail.

2017 SPIE Advanced Lithography – EUVL Conference Update

To simplify the vast amount of information from the 2017 SPIE AL EUVL Conference for my blog, I have adopted a new format. It includes a short summary of EUVL Status, a list of notable updates, and additions to the current list of EUVL Challenges (previously published on this site).

Areas of Focus and List of Challenges for EUV Lithography at 7nm, 5nm and 3nm Nodes

As we look forward to 2017 SPIE Advanced Lithography Conference in San Jose next week, the focus once again will be on EUV Lithography, its readiness for manufacturing and plans of chip makers for starting to use EUVL in their fabs.

Bringing you Holiday Cheers – Courtesy of Moore’s Law

At the heart of this happy surge are the computer chips that grow more powerful every year without increasing their price. I would like to tell you how we in the computer chip industry do this, and what it will take to continue this trend in the coming decades.

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