Sematech Knowledge Series Meetings Announced
This year’s Sematech Knowledge Series includes meetings on lithography, wafer cleaning, gate stacks, and manufacturing productivity, among a variety of topics aimed at exploring critical technology challenges and building industry consensus.
Lithography
The 2011 lithography-related meetings include the Advanced Mask Cleaning Workshop, to be held in Monterey, Calif. in September, in conjunction with the BACUS conference. The full-day workshop will focus on mask cleaning and surface preparation challenges, including sub-30-nm particles, molecular contamination, defect analysis, and environmental issues.
The International Symposium on Extreme Ultraviolet Lithography, hosted by Sematech, Selete, EUVA, and imec, is planned for Oct. 17-19 in Miami. The EUVL Symposium will include discussions of sources, masks, optics, resists, contamination control, and the metrology required to support EUVL pilot line manufacturing requirements. The EUV meeting will be followed by the Immersion Extensions Symposium, planned for Oct. 20-21, also in Miami.
Advanced Technologies
The Surface Preparation and Cleaning Conference (SPCC) will be held in Austin, March 21-23. The 2011 SPCC will explore wafer and mask cleaning challenges for the 32nm node and beyond.
The Design for Reliability Workshop – Stress Management for 3D ICs Using Through Silicon Vias workshop is set for Mar. 17 in Santa Clara. The workshop will examine mechanical stress-driven failure mechanisms and modeling methodologies pertaining to via-middle TSV 3D stacking technologies.
Another 3D related event, the Workshop on Metrology for 3D Interconnect, is planned for July 13 in San Francisco during Semicon West. It will focus on how wafer metrology technologies can be enhanced to measure 3D interconnect processes.
The International Symposium on Advanced Gate Stack Technology will explore gate stacks for sub-22nm devices, including high-k/metal gate stacks for Si, SiGe, and III-V high-performance MOSFETs; metal/high-k/metal gate stacks for storage capacitors and resistive change memory; high-k/metal gate for flash memory; insulators and metals for high-performance NEMS and sensors; and magnetic material stacks for spin-based devices.
Manufacturing
This year’s ISMI Manufacturing Weeks will be held in both Asia and the United States, including workshops, supplier presentations, and exhibits. They will include a Mature Technology Fab program, and a series of member-only sessions devoted to reviewing program activities, technology transfers, and member feedback. The ISMI Manufacturing Weeks will be held in June 2011 in Tokyo and in September in Hsinchu, Taiwan.
The ISMI Symposium on Manufacturing Effectiveness will be held in October in Austin. Sematech said it is “the semiconductor industry’s most important event for exchanging ideas about real-time, cost-saving solutions to help improve manufacturing productivity.” The event includes sessions on advanced equipment control and advanced process control (AEC/APC), as well as automated, data-driven decision making.
Other events include the Sematech Symposia, planned for Japan, Taiwan, and Korea to discuss Sematech’s model for consortial R&D. The events will include both public and member-only sessions. The meeting are schedule for June in Tokyo, during September in Hsinchu, and in October in Seoul.
The International Technology Roadmap for Semiconductors (ITRS) Conferences come as the roadmap is being completely revised in 2011 with new information. “The ITRS public conferences offer technologists and strategists from the manufacturing and supplier communities the opportunity to participate in building the next ITRS by providing input to the working group teams of industry and research experts who will revise it,” Sematech said.
The ITRS meetings are scheduled for July 13 in San Francisco during Semicon West, and Dec. 14 in Seoul.
Sematech CEO Dan Armbrust said the diverse Sematech Knowledge Series meetings “share a common purpose: to keep the industry moving profitably forward by making the most informed, cost-effective decisions possible.”
Information on the public meetings, as well as others which may be added during the course of the year, can be obtained from the Sematech site. Several of the meetings will be accepting sponsorships and exhibits.
