http://semimd.com/applied Deep Insights for Chip Builders Thu, 18 Oct 2012 19:13:36 +0000 hourly 1 http://wordpress.org/?v= http://semimd.com/applied/2012/10/18/epitaxy-seeking-crystalline-perfection/#comment-87 Doug Meyer Thu, 18 Oct 2012 19:13:36 +0000 http://semimd.com/applied/?p=50#comment-87 Actually, epi was invented at AT&T for bipolar technologies ca. 1960. Epi was first used in CMOS in the mid-80s in order to simplify scalability of MOSFETs since epi was a fast solution to latch-up, improving gate oxide breakdown voltage and eliminating crystal originated pits. It's nice to see those barrel reactor and pancake drawings on the white board. It was also good to see my colleague Dave Carlson again, as we both pulled duty at Applied back in the day. I think that HiPOX started the equipment business for Applied, not epi. Epi came with Walt Benzing from Union Carbide in the 70s. Actually, epi was invented at AT&T for bipolar technologies ca. 1960. Epi was first used in CMOS in the mid-80s in order to simplify scalability of MOSFETs since epi was a fast solution to latch-up, improving gate oxide breakdown voltage and eliminating crystal originated pits. It’s nice to see those barrel reactor and pancake drawings on the white board. It was also good to see my colleague Dave Carlson again, as we both pulled duty at Applied back in the day. I think that HiPOX started the equipment business for Applied, not epi. Epi came with Walt Benzing from Union Carbide in the 70s.

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